Particle Analysis - Do they make a line?
Tue, 01/31/2012 - 08:32 am
We are doing a far amount of image analysis mostly on a micro level. We have identified features/defects and measured size and position.
The next quest is did the defects arise from a macro level event? So the first test I would like to do is do the defects form a line. The simplistic regression analysis I can handle, but what I am thinking about is how to set the range of defects to consider. I have a large wafer which multiple defects that show up as dots on a macro level and the eye can logically group them into separate line defects.
How do I think about programmically grouping them into separate lines and then creating some figures of merit?
I hope I am clear in my request.