Particle Analysis - Do they make a line?

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Tue, 01/31/2012 - 08:32 am

Hi all,

We are doing a far amount of image analysis mostly on a micro level. We have identified features/defects and measured size and position.

The next quest is did the defects arise from a macro level event? So the first test I would like to do is do the defects form a line. The simplistic regression analysis I can handle, but what I am thinking about is how to set the range of defects to consider. I have a large wafer which multiple defects that show up as dots on a macro level and the eye can logically group them into separate line defects.

How do I think about programmically grouping them into separate lines and then creating some figures of merit?

I hope I am clear in my request.
The typical way to handle this is using the Hough transform.

It's even implemented in Igor. See DisplayHelpTopic "Hough Transform"

January 31, 2012 at 08:41 am - Permalink

Thank you very much.

This is the place to start and I knew Igor would have the tools built in.

January 31, 2012 at 09:54 am - Permalink