Correlating two sets of xy locations
Mon, 03/15/2010 - 09:16 pm
Before I start from scratch on this problem for a colleague, I am looking for a head start.
The problem: I have two sets of particle data from a defect inspection tool and the question is what particles were added (or removed) from the pre and post measurements. The issue is that the substrate is hand loaded into the tool so the coordinate systems are off a bit with an X and Y translation as well as a rotation. The particles may also have shifted slightly between measurements. So how do I correlate the frames of references between the data sets and line up particles that were there originally and which are newly added? See attached image for the representative data.
Some thoughts I had was to hand select via a marquee matching pairs and then create an algorithm to calculate the offset and rotation. Any other ideas.
Thanks in Advance